Several amplification microelectromechanical devices formed of many identical micro-units are connected in a serial-parallel configuration, each being individually actuated and amplifying its own input motion. The micro-devices realize the border-crossing from the micro- to the meso-scale displacement domain as they combine the micron-level individual inputs into millimeter-range output levels. The base structural unit is a flexure-based compliant device that is capable of transforming the input from a thermo-actuator into an amplified displacement, about a direction perpendicular to the input one. The base unit is designed based on performance criteria such as displacement amplification, input stiffness and output stiffness by utilizing finite element simulation and an algorithm based on closed-form compliance equations of the incorporated flexure hinges. The microelectromechanical amplification device is monitored by means of embedded capacitive displacement sensors for the input port.
Figure 1: Conceptual Design
Figure 2: Device being prepared for experimentation
Figure 3: Amplification & capacitance comb-drive with harmonic excitation
Figure 4: Design verification using Scanning Electron Microscope (SEM)
Figure 5: Radial configurations for micro-flow valves